MKS Global Service Programs
Trusted Service & Support

Comprehensive repair and service programs maximize the value of your installed base of critical subcomponents to ensure you...

  • Extend the life of your equipment
  • Drive more predictability
  • Increase uptime and tool availability
  • Improve productivity

Committed to your success, MKS provides highly skilled engineers and technicians who understand your process, your requirements, and keep your equipment up and running.

  • Only MKS original parts used for all repairs
  • Trained technicians use current, proven methods and techniques
  • All repairs qualified on an MKS-designed test stand

Our global network of 18 MKS Service Centers located throughout North America, Europe, and Asia-Pacific ensure that you have direct access to repair, refurbishment, and calibration services when and where you need them. MKS service programs address your operational efficiency while offering flexibility as your requirements change.

Global Service Programs:

Field Service Support
World-class on-site assistance, including preventive maintenance, operations training, upgrade support, and installation and setup.

Repair, Calibration & Refurbishment
Maintain and extend the life of your investment in MKS equipment.

Key Global Service Program Links:

MKS Global Service Programs Brochure
Learn more about our comprehensive repair and service programs.

Repair, Calibration, and Refurbishment Services Data Sheet
Details about our repair, calibration, and refurbishment programs.

Refurbishment Program: MKS RF Power Generators
Protect your investment with comprehensive refurbishment and testing services for MKS RF Power Generators.

Refurbishment Program: ASTRON® Remote Plasma Source (2L, i, and ex Models)
Ensure your ASTRON products are operating at their peak performance with comprehensive refurbishment and testing from MKS.

RMA Form
Complete this form when making a return.

Health & Safety Form
Complete and include this form when sending equipment to us for calibration and/or repair.

How to Order Services
Instructions and options for ordering MKS repair and calibration services.

Need more help?

Contact an MKS Global Service Specialist by email or call: 800-227-8766 or +1-978-645-5500 (outside the USA).